2/2/2011	3:37:13 PM	SiCl4 post valve opened
2/2/2011	3:37:27 PM	Helium MFC set to  500.000000
2/2/2011	3:38:09 PM	Helium valve opened
2/2/2011	3:45:33 PM	SiCl4 MFC set to  100.000000
2/2/2011	3:45:35 PM	SiCl4 pre valve opened
2/2/2011	3:46:53 PM	Helium valve closed
2/2/2011	3:46:54 PM	SiCl4 pre valve closed
2/2/2011	3:46:54 PM	SiCl4 post valve closed
2/2/2011	3:47:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2011	3:47:11 PM	Recipe started at 3:47 PM
2/2/2011	3:47:11 PM	H2 valve closed
2/2/2011	3:47:11 PM	BCl3 valve closed
2/2/2011	3:47:11 PM	PH3 valve closed
2/2/2011	3:47:11 PM	SiCl4 pre valve closed
2/2/2011	3:47:11 PM	SiCl4 post valve closed
2/2/2011	3:47:11 PM	Main Vac valve closed
2/2/2011	3:47:11 PM	Bypass valve closed
2/2/2011	3:47:11 PM	Bubbler valve closed
2/2/2011	3:47:11 PM	Helium valve opened
2/2/2011	3:47:11 PM	Helium MFC set to  500.000000
2/2/2011	3:47:11 PM	H2 MFC set to  0.000000
2/2/2011	3:47:11 PM	BCl3 MFC set to  0.000000
2/2/2011	3:47:11 PM	PHl3 MFC set to  0.000000
2/2/2011	3:47:11 PM	SiCl4 MFC set to  0.000000
2/2/2011	3:47:11 PM	Bypass solenoid MFC set to  0.000000
2/2/2011	3:47:11 PM	Tube furnace set to 0
2/2/2011	3:48:28 PM	Helium valve closed
2/2/2011	3:48:28 PM	H2 valve closed
2/2/2011	3:48:28 PM	BCl3 valve closed
2/2/2011	3:48:28 PM	PH3 valve closed
2/2/2011	3:48:28 PM	SiCl4 pre valve closed
2/2/2011	3:48:28 PM	SiCl4 post valve closed
2/2/2011	3:48:28 PM	Main Vac valve closed
2/2/2011	3:48:28 PM	Bypass valve closed
2/2/2011	3:48:28 PM	Bubbler valve closed
2/2/2011	3:48:28 PM	Helium MFC set to  0.000000
2/2/2011	3:48:28 PM	H2 MFC set to  0.000000
2/2/2011	3:48:28 PM	BCl3 MFC set to  0.000000
2/2/2011	3:48:28 PM	PHl3 MFC set to  0.000000
2/2/2011	3:48:28 PM	SiCl4 MFC set to  0.000000
2/2/2011	3:48:28 PM	Bypass solenoid MFC set to  0.000000
2/2/2011	3:48:29 PM	Tube furnace set to 0
2/2/2011	3:48:29 PM	Run finished at 3:48 PM
2/2/2011	3:48:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/2/2011	3:50:33 PM	Bypass valve opened
2/2/2011	3:50:34 PM	Bypass valve closed
2/2/2011	3:50:39 PM	Helium MFC set to  500.000000
2/2/2011	3:50:40 PM	Helium valve opened
2/2/2011	3:50:41 PM	Helium valve closed
2/2/2011	3:50:42 PM	Helium valve opened
2/2/2011	3:50:59 PM	Bypass valve opened
2/2/2011	3:51:00 PM	Bypass valve closed
2/2/2011	3:51:09 PM	Bypass valve opened
2/2/2011	3:51:10 PM	Bypass valve closed
2/2/2011	3:51:26 PM	Bypass valve opened
2/2/2011	3:51:27 PM	Bypass valve closed
2/2/2011	3:51:41 PM	Helium valve closed
2/2/2011	3:51:43 PM	Helium valve opened
2/2/2011	3:51:45 PM	Helium valve closed
2/2/2011	3:52:23 PM	SiCl4 post valve opened
2/2/2011	3:52:25 PM	SiCl4 post valve closed
2/2/2011	3:52:29 PM	SiCl4 MFC set to  100.000000
2/2/2011	3:52:30 PM	SiCl4 pre valve opened
2/2/2011	3:52:33 PM	SiCl4 pre valve closed
2/2/2011	3:52:35 PM	SiCl4 MFC set to  0.000000
2/2/2011	4:25:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2011	4:25:37 PM	Recipe started at 4:25 PM
2/2/2011	4:25:37 PM	Helium valve closed
2/2/2011	4:25:37 PM	H2 valve closed
2/2/2011	4:25:37 PM	BCl3 valve closed
2/2/2011	4:25:37 PM	PH3 valve closed
2/2/2011	4:25:37 PM	SiCl4 pre valve closed
2/2/2011	4:25:37 PM	SiCl4 post valve closed
2/2/2011	4:25:37 PM	Main Vac valve closed
2/2/2011	4:25:37 PM	Bubbler valve closed
2/2/2011	4:25:37 PM	Bypass valve opened
2/2/2011	4:25:37 PM	Helium MFC set to  0.000000
2/2/2011	4:25:37 PM	H2 MFC set to  0.000000
2/2/2011	4:25:37 PM	BCl3 MFC set to  0.000000
2/2/2011	4:25:37 PM	PHl3 MFC set to  0.000000
2/2/2011	4:25:37 PM	SiCl4 MFC set to  0.000000
2/2/2011	4:25:37 PM	Bypass solenoid MFC set to  0.000000
2/2/2011	4:25:37 PM	Tube furnace set to 0
2/2/2011	4:26:00 PM	Helium valve closed
2/2/2011	4:26:00 PM	H2 valve closed
2/2/2011	4:26:00 PM	BCl3 valve closed
2/2/2011	4:26:00 PM	PH3 valve closed
2/2/2011	4:26:00 PM	SiCl4 pre valve closed
2/2/2011	4:26:00 PM	SiCl4 post valve closed
2/2/2011	4:26:00 PM	Bubbler valve closed
2/2/2011	4:26:00 PM	Main Vac valve opened
2/2/2011	4:26:00 PM	Bypass valve opened
2/2/2011	4:26:00 PM	Helium MFC set to  0.000000
2/2/2011	4:26:00 PM	H2 MFC set to  0.000000
2/2/2011	4:26:00 PM	BCl3 MFC set to  0.000000
2/2/2011	4:26:00 PM	PHl3 MFC set to  0.000000
2/2/2011	4:26:00 PM	SiCl4 MFC set to  0.000000
2/2/2011	4:26:00 PM	Bypass solenoid MFC set to  0.000000
2/2/2011	4:26:00 PM	Tube furnace set to 0
2/2/2011	4:26:00 PM	Run finished at 4:26 PM
2/2/2011	4:26:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/2/2011	4:26:09 PM	Helium MFC set to  500.000000
2/2/2011	4:26:11 PM	Helium valve opened
2/2/2011	4:26:18 PM	SiCl4 post valve opened
2/2/2011	4:26:25 PM	SiCl4 MFC set to  100.000000
2/2/2011	4:26:28 PM	SiCl4 pre valve opened
2/2/2011	6:53:59 PM	Helium valve closed
2/2/2011	6:54:00 PM	SiCl4 post valve closed
2/2/2011	6:54:01 PM	SiCl4 pre valve closed
2/2/2011	6:54:05 PM	Bypass valve closed
2/2/2011	6:54:05 PM	Main Vac valve closed
2/2/2011	6:54:53 PM	Bypass valve opened
2/2/2011	6:54:53 PM	Main Vac valve opened
2/2/2011	6:55:06 PM	Bypass valve closed
2/2/2011	6:55:07 PM	Main Vac valve closed
2/2/2011	6:55:20 PM	Helium valve opened
2/2/2011	6:55:20 PM	Helium valve closed
2/2/2011	6:55:22 PM	Helium valve opened
2/2/2011	6:56:02 PM	Helium valve closed
2/2/2011	6:56:05 PM	SiCl4 post valve opened
2/2/2011	6:56:06 PM	SiCl4 post valve closed
2/2/2011	6:56:09 PM	SiCl4 pre valve opened
2/2/2011	6:56:12 PM	SiCl4 pre valve closed
2/2/2011	6:56:37 PM	Bypass valve opened
2/2/2011	6:57:05 PM	Main Vac valve opened
2/2/2011	6:57:13 PM	SiCl4 post valve opened
2/2/2011	6:57:16 PM	Helium valve opened
2/2/2011	6:57:20 PM	SiCl4 pre valve opened
